Graphene Synthesison Copper Plate by Microwave Plasma CVD

Abstract

This paper presents the synthesized graphene by using microwave plasma CVD on coper plate created from microwave oven. The graphene film on coper plate was successfully created inside reactor by using vapor of the ethanol as the carbon source in atmosphere of argon. The flow rate of the argon were varied 1, 2, 3, 4 and 5 liter/min. The created graphene films were characterized by Raman spectroscopy. The three major bands of graphene, D, G and 2D-band located around 1345, 1579 and 2686 cm-1, respectively without effect of the flow rate. It was found that the created graphene films had low defect for all conditions. However, when using the flow rate of argon 1 liter/min, and repeated 5 times, the created graphene had 2 layers. But for others flow rates, the created graphene films had multilayers.